Publications1985
- V.S. Lysenko, M.M. Lokshin, A.N. Nazarov, and T.E. Rudenko RF Plasma Annealing of Implanted MIS Structures Phys. Stat. Sol. (a) vol.88, pp.705-712 (1985)
Department of Functional Materials, Nanosized Structures and Devices
V. Lashkaryov Institute of Semiconductor Physics NAS of Ukraine
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